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Fundamentals of Semiconductor Fabrication Paperback - 2003 - 1st Edition
by Gary S. May; Simon M. Sze; Matt May
From the rear cover
This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film deposition.
- The book integrates Computer Modeling & Simulation tools throughout.
- Process simulation is used as a tool for what-if analysis and discussion.
- Comprehensive coverage of process sequences helps readers connect individual steps into a cohesive whole.
Details
- Title Fundamentals of Semiconductor Fabrication
- Author Gary S. May; Simon M. Sze; Matt May
- Binding Paperback
- Edition number 1st
- Edition 1
- Pages 320
- Volumes 1
- Language ENG
- Publisher John Wiley & Sons
- Date 2003-04-11
- Illustrated Yes
- Features Bibliography, Illustrated, Index
- ISBN 9780471232797 / 0471232793
- Weight 1.2 lbs (0.54 kg)
- Dimensions 9.9 x 7 x 0.9 in (25.15 x 17.78 x 2.29 cm)
- Library of Congress subjects Integrated circuits - Design and construction, Semiconductors - Design and construction
- Library of Congress Catalog Number 2003276248
- Dewey Decimal Code 621
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Fund Semiconductor Fabrication
by S. May, Gary
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Fundamentals of Semiconductor Fabrication
by May, Gary S.; Sze, Simon M
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Wiley, 2003-04-11. Paperback. New. New. In shrink wrap. Looks like an interesting title!
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Fund Semiconductor Fabrication
by S. May, Gary
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Fundamentals of Semiconductor Fabrication
by Gary S. May/ Simon M. Sze
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Fundamentals of Semiconductor Fabrication
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John Wiley & Sons , pp. xiii + 305 1st Edition . Papeback. New.
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