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Glow Discharge Processes : Sputtering and Plasma Etching

Glow Discharge Processes : Sputtering and Plasma Etching

Glow Discharge Processes : Sputtering and Plasma Etching Hardback - 1980

by Brian Chapman

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  • Hardback
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Description

Wiley & Sons, Incorporated, John, 1980. Hardcover. Acceptable. Former library book; Readable copy. Pages may have considerable notes/highlighting. ~ ThriftBooks: Read More, Spend Less.Dust jacket quality is not guaranteed.
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Details

  • Title Glow Discharge Processes : Sputtering and Plasma Etching
  • Author Brian Chapman
  • Binding Hardback
  • Edition [ Edition: first
  • Condition Used - Acceptable
  • Pages 432
  • Volumes 1
  • Language ENG
  • Publisher Wiley & Sons, Incorporated, John, New York
  • Publication date 1980
  • Features Index
  • Bookseller's Inventory # G047107828XI5N10
  • ISBN 9780471078289 / 047107828X
  • Weight 1.64 lbs (0.74 kg)
  • Dimensions 9.7 x 6.18 x 1.21 in (24.64 x 15.70 x 3.07 cm)
  • Category Science
  • Library of Congress subjects Plasma etching, Sputtering (Physics)
  • Library of Congress Catalogue Number 80017047
  • Dewey Decimal Code 537.52
  • Quantity available 1

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About the author

Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.

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