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Glow Discharge Processes: Sputtering and Plasma Etching

Glow Discharge Processes: Sputtering and Plasma Etching

Glow Discharge Processes: Sputtering and Plasma Etching
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Glow Discharge Processes: Sputtering and Plasma Etching Hardback - 1980

by Chapman, Brian

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hardcover. Good. Access codes and supplements are not guaranteed with used items. May be an ex-library book.
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Details

  • Title Glow Discharge Processes: Sputtering and Plasma Etching
  • Author Chapman, Brian
  • Binding Hardback
  • Edition [ Edition: first
  • Condition Used - Good
  • Pages 432
  • Volumes 1
  • Language ENG
  • Publisher Wiley-Interscience, New York
  • Publication date 1980-09-25
  • Features Index
  • Bookseller's Inventory # 047107828X.G
  • ISBN 9780471078289 / 047107828X
  • Weight 1.64 lbs (0.74 kg)
  • Dimensions 9.7 x 6.18 x 1.21 in (24.64 x 15.70 x 3.07 cm)
  • Category Science
  • Library of Congress subjects Plasma etching, Sputtering (Physics)
  • Library of Congress Catalogue Number 80017047
  • Dewey Decimal Code 537.52
  • Quantity available 1

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About the author

Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.

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