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Micro Electronic and Mechanical Systems

Micro Electronic and Mechanical Systems

Micro Electronic and Mechanical Systems Hardback - 2009

by Kenichi Takahata (Editor)

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Hardcover. New. New Book; Fast Shipping from UK; Not signed; Not First Edition; This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and pr
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Details

  • Title Micro Electronic and Mechanical Systems
  • Author Kenichi Takahata (Editor)
  • Binding Hardback
  • Edition U. S. EDITION
  • Condition New
  • Pages 528
  • Volumes 1
  • Language ENG
  • Publisher Intechopen
  • Publication date 2009-12-01
  • Bookseller's Inventory # ria9789533070278_inp
  • ISBN 9789533070278 / 9533070277
  • Weight 2.28 lbs (1.03 kg)
  • Dimensions 9.61 x 6.69 x 1.13 in (24.41 x 16.99 x 2.87 cm)
  • Category Technology & Industrial Arts
  • Quantity available 330

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Reader reviews for Micro Electronic and Mechanical Systems

From the publisher

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.
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