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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices Paperback - 1998

by Eric Garfunkel (Editor); Evgeni Gusev (Editor); Alexander Vul' (Editor)

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Paperback. New. New Book; Fast Shipping from UK; Not signed; Not First Edition; An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of
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Details

  • Title Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
  • Author Eric Garfunkel (Editor); Evgeni Gusev (Editor); Alexander Vul' (Editor)
  • Binding Paperback
  • Edition Softcover reprin
  • Condition New
  • Pages 507
  • Volumes 1
  • Language ENG
  • Publisher Springer
  • Publication date 1998-03-31
  • Bookseller's Inventory # ria9780792350088_inp
  • ISBN 9780792350088 / 0792350081
  • Weight 1.59 lbs (0.72 kg)
  • Dimensions 9.21 x 6.14 x 1.05 in (23.39 x 15.60 x 2.67 cm)
  • Category Technology & Industrial Arts
  • Dewey Decimal Code 621.381
  • Quantity available 134

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Reader reviews for Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

From the publisher

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.
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