Process Variations in Microsystems Manufacturing Hardback - 2020
by Michael Huff
- New
- Hardback
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Details
- Title Process Variations in Microsystems Manufacturing
- Author Michael Huff
- Binding Hardback
- Condition New
- Pages 521
- Volumes 1
- Language ENG
- Publisher Springer
- Publication date 2020-04-10
- Illustrated Yes
- Features Illustrated
- Bookseller's Inventory # ria9783030405588_inp
- ISBN 9783030405588 / 3030405583
- Weight 2.06 lbs (0.93 kg)
- Dimensions 9.21 x 6.14 x 1.19 in (23.39 x 15.60 x 3.02 cm)
- Category Technology & Industrial Arts
- Quantity available 636
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From the publisher
From the rear cover
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.
- Examines and explains the basic processing steps used in MEMS fabrication;
- Illustrates best practices and lessons learned in manufacturingof microsystems for commercial products with detailed case studies;
- Reviews future methods that may provide for improved process variations.
