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Characterization and Metrology for ULSI Technology 2005
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Characterization and Metrology for ULSI Technology 2005 Hardcover - 2005 - 1st Edition

by D. G. Seiler; David G. Seiler (Editor); Alain C. Diebold (Editor)


From the publisher

Summarizes major issues and gives reviews of important measurement techniques that are crucial to the advances in semiconductor technology. This book covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics.

Details

  • Title Characterization and Metrology for ULSI Technology 2005
  • Author D. G. Seiler; David G. Seiler (Editor); Alain C. Diebold (Editor)
  • Binding Hardcover
  • Edition number 1st
  • Edition 1
  • Pages 667
  • Volumes 1
  • Language ENG
  • Publisher Springer
  • Date September 29, 2005
  • Illustrated Yes
  • ISBN 9780735402775 / 0735402779
  • Weight 4.17 lbs (1.89 kg)
  • Dimensions 10.94 x 8.43 x 1.71 in (27.79 x 21.41 x 4.34 cm)
  • Library of Congress subjects Integrated circuits - Ultra large scale
  • Library of Congress Catalog Number 2005931820
  • Dewey Decimal Code 621.395
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