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Micro Electro Mechanical System Design
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Micro Electro Mechanical System Design Hardback - 2005

by James J. Allen

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From the publisher

Micro Electro Mechanical System Design presents a unified treatment of all micro electro mechanical system (MEMS) design procedures. The author focuses on the complete process required for designing and developing MEMS. Instead of focusing only on the detailed engineering and physics underlying a MEMS device, such as a gyroscope or fluidic device, this book looks at the entire process that a MEMS design engineer must consider in order to make informed technical decisions. The chapters answer important questions such as what fabrication processes to use, which design approach will produce a reliable device with good yield, and what packaging and assembly requirements are needed.

First line

Making devices small has long had engineering, scientific, and aesthetic motivations.

Details

  • Title Micro Electro Mechanical System Design
  • Author James J. Allen
  • Binding Hardback
  • Edition INTERNATIONAL ED
  • Pages 492
  • Volumes 1
  • Language ENG
  • Publisher CRC Press
  • Publication date 2005-07-08
  • Illustrated Yes
  • Features Bibliography, Illustrated, Index, Table of Contents
  • ISBN 9780824758240 / 0824758242
  • Weight 1.75 lbs (0.79 kg)
  • Dimensions 9.1 x 6.1 x 1.2 in (23.11 x 15.49 x 3.05 cm)
  • Category Technology & Industrial Arts
  • Library of Congress subjects Engineering design, Microelectromechanical systems - Design and
  • Library of Congress Catalogue Number 2005041771
  • Dewey Decimal Code 621

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Citations

  • Scitech Book News, 06/01/2006, Page 117
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