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An Introduction to Microelectromechanical Systems Engineering
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An Introduction to Microelectromechanical Systems Engineering Hardback - 1999

by Nadim Maluf

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Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates -- as well as MEMS design for nozzles, sensors, valves and other applications.

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From the publisher

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

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sensor in the engine compartment helped the engine's electronic control unit maintain, at the location's high altitude, the proper proportions in the mixture of air and fuel.

Details

  • Title An Introduction to Microelectromechanical Systems Engineering
  • Author Nadim Maluf
  • Binding Hardback
  • Edition 2nd Edition
  • Pages 292
  • Volumes 1
  • Language ENG
  • Publisher Artech House Publishers, Boston
  • Publication date 1999-11-30
  • ISBN 9780890065815 / 0890065810
  • Weight 1.42 lbs (0.64 kg)
  • Dimensions 9.29 x 6.33 x 0.95 in (23.60 x 16.08 x 2.41 cm)
  • Category Technology & Industrial Arts
  • Library of Congress subjects Microelectromechanical systems
  • Library of Congress Catalogue Number 99052406
  • Dewey Decimal Code 621.381

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Introduction to Microelectromechanical Systems Engineering
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Introduction to Microelectromechanical Systems Engineering

by Maluf, Nadim

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Introduction to Microelectromechanical Systems Engineering
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Introduction to Microelectromechanical Systems Engineering

by Nadim Maluf

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Artech House, 1999. Hardcover. Good. Disclaimer:A copy that has been read, but remains in clean condition. All pages are intact, and the cover is intact. The spine may show signs of wear. Pages can include limited notes and highlighting, and the copy can include previous owner inscriptions. An ex-library book and may have standard library stamps and/or stickers.
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An Introduction to Microelectromechanical Systems Engineering

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An Introduction to Microelectromechanical Systems Engineering
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An Introduction to Microelectromechanical Systems Engineering

by Nadim Maluf

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An Introduction to Microelectromechanical Systems Engineering
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An Introduction to Microelectromechanical Systems Engineering

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by Nadim Maluf

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An Introduction to Microelectromechanical Systems Engineering
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An Introduction to Microelectromechanical Systems Engineering

by Nadim Maluf

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ISBN 10 / ISBN 13
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An Introduction To Microelectromechanical Systems Engineering
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An Introduction To Microelectromechanical Systems Engineering

by Maluf, Nadim,

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An Introduction To Microelectromechanical Systems Engineering
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An Introduction To Microelectromechanical Systems Engineering

by Maluf, Nadim,

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9780890065815 / 0890065810
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