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An Introduction to Microelectromechanical Systems Engineering Hardback - 1999
by Nadim Maluf
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Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates -- as well as MEMS design for nozzles, sensors, valves and other applications.
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sensor in the engine compartment helped the engine's electronic control unit maintain, at the location's high altitude, the proper proportions in the mixture of air and fuel.
Details
- Title An Introduction to Microelectromechanical Systems Engineering
- Author Nadim Maluf
- Binding Hardback
- Edition 2nd Edition
- Pages 292
- Volumes 1
- Language ENG
- Publisher Artech House Publishers, Boston
- Publication date 1999-11-30
- ISBN 9780890065815 / 0890065810
- Weight 1.42 lbs (0.64 kg)
- Dimensions 9.29 x 6.33 x 0.95 in (23.60 x 16.08 x 2.41 cm)
- Category Technology & Industrial Arts
- Library of Congress subjects Microelectromechanical systems
- Library of Congress Catalogue Number 99052406
- Dewey Decimal Code 621.381
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