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Etching in Microsystem Technology
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Etching in Microsystem Technology Hardback - 1999 - 1st Edition

by J. M. Kohler; Michael Koehler; Michael Kohler

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From the publisher

Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices.
The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering.
The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.

Details

  • Title Etching in Microsystem Technology
  • Author J. M. Kohler; Michael Koehler; Michael Kohler
  • Binding Hardback
  • Edition number 1st
  • Edition 1
  • Pages 384
  • Volumes 1
  • Language ENG
  • Publisher Wiley-Vch
  • Publication date 1999
  • ISBN 9783527295616 / 3527295615
  • Category Technology & Industrial Arts
  • Library of Congress Catalogue Number 99233639
  • Dewey Decimal Code 621.381

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Etching in Microsystem Technology
Stock photo: cover may vary

Etching in Microsystem Technology

by Köhler, Michael

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Used
ISBN 10 / ISBN 13
9783527295616 / 3527295615
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A$316.47
A$17.36 Delivery to USA

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Wiley-VCH. Used - Good. Ships from UK in 48 hours or less (usually same day). Your purchase helps support Sri Lankan Children's Charity 'The Rainbow Centre'. Ex-library, so some stamps and wear, but in good overall condition. 100% money back guarantee. We are a world class secondhand bookstore based in Hertfordshire, United Kingdom and specialize in high quality textbooks across an enormous variety of subjects. We aim to provide a vast range of textbooks, rare and collectible books at a great price. Our donations to The Rainbow Centre have helped provide an education and a safe haven to hundreds of children who live in appalling conditions. We provide a 100% money back guarantee and are dedicated to providing our customers with the highest standards of service in the bookselling industry.
Add to wish list
Item price
A$316.47
A$17.36 Delivery to USA